JPS6237078U - - Google Patents
Info
- Publication number
- JPS6237078U JPS6237078U JP12633885U JP12633885U JPS6237078U JP S6237078 U JPS6237078 U JP S6237078U JP 12633885 U JP12633885 U JP 12633885U JP 12633885 U JP12633885 U JP 12633885U JP S6237078 U JPS6237078 U JP S6237078U
- Authority
- JP
- Japan
- Prior art keywords
- incident angle
- substrate
- view
- holder
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12633885U JPS6237078U (en]) | 1985-08-19 | 1985-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12633885U JPS6237078U (en]) | 1985-08-19 | 1985-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237078U true JPS6237078U (en]) | 1987-03-05 |
Family
ID=31020049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12633885U Pending JPS6237078U (en]) | 1985-08-19 | 1985-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237078U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59208068A (ja) * | 1983-05-13 | 1984-11-26 | Hitachi Ltd | 薄膜形成装置 |
-
1985
- 1985-08-19 JP JP12633885U patent/JPS6237078U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59208068A (ja) * | 1983-05-13 | 1984-11-26 | Hitachi Ltd | 薄膜形成装置 |